JEOL: Release of a New Schottky Field Emission(FE) Scanning Electron Microscope JSM-F100

JEOL Ltd. (TOKYO:6951) (www.jeol.com) (President & COO Izumi Oi) announces the release of a new Schottky field emission scanning electron microscope, JSM-F100 in August 2019.

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https://www.jeol.co.jp/en/news/detail/20190804.3456.html

Background

Scanning electron microscopes(SEMs) are used in various fields; nanotechnology, metals, semiconductors, ceramics, medicine, and biology. With application expansion, SEM users are in need of fast high-quality data acquisition and simple compositional information confirmation with seamless operation.

The JSM-F100 incorporates our highly regarded In-lens Schottky Plus FE electron gun and "Neo Engine"(electron optical control system) as well as a new GUI "SEM Center" and an innovative "LIVE-AI(Live Image Visual Enhancer-Artificial Intelligence) filter". This enables an optimal combination of high-spatial-resolution imaging and operability. Furthermore, a standard JEOL energy dispersive X-ray spectrometer(EDS) is fully integrated within "SEM Center" for seamless acquisition from images to elemental analysis results. The JSM-F100 achieves superb work efficiency, 50% or higher than that of our previous JSM-7000 series, realizing dramatically-increased high throughput.

Features

1. In-lens Schottky Plus FE electron gun
   Enhanced integration of the electron gun and low-aberration condenser lens provides higher brightness. Ample probe current at low accelerating voltage supports various capabilities from high-resolution imaging to high-speed elemental mapping.
2. Hybrid Lens(HL)
   The Hybrid Lens(HL), combining the electrostatic and magnetic field lens, supports high-spatial-resolution imaging and analysis of various specimens.
3. Neo Engine(New Electron Optical Engine)
   Neo Engine, a cutting-edge electron optical control system, significantly improves the precision of automatic functions and operability.
4. New function of "SEM Center"
   A new operation GUI "SEM Center" fully integrates SEM imaging and EDS analysis and provides next-generation operability and high-resolution images obtained with FE-SEM.
5. New "Zeromag" function
   "Zeromag", incorporated for seamless transition from optical to SEM imaging, makes it easy to locate the target specimen area.
6. New LIVE-AI filter*
   Utilizing the AI(artificial intelligence) capability, LIVE-AI filter is incorporated for a higher quality of live images. Unlike image integration processing, this new filter displays a seamless moving live image with no residual image and is very effective for quickly searching observation areas, focusing, and stigmator adjustment.
   *optional

Specifications
Resolution(1 kV)	1.3 nm
Resolution(20 kV)	0.9 nm
Accelerating voltage	0.01 to 30 kV
Standard detectors	Upper Electron Detector(UED), Secondary Electron Detector(SED)
Electron gun	In-lens Schottky Plus FE electron gun
Probe current	A few pA to 300 nA(30 kV) A few pA to 100 nA(5 kV)
Objective lens	Hybrid Lens(HL)
Specimen stage	Full eucentric goniometer stage
Specimen movement	X: 70 mm, Y: 50 mm, Z: 2 to 41 mm Tilt: –5 to 70°, Rotation: 360°
EDS detector	Energy resolution: 133 eV or less Detectable elements: B(boron) to U(uranium) Detection area: 60 mm2

Annual unit sales target

60 units/year

JEOL Ltd.
3-1-2, Musashino, Akishima, Tokyo, 196-8558, Japan
Izumi Oi, President & COO
(Stock code:6951, Tokyo Stock Exchange First Section)
www.jeol.com

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Contact information

JEOL Ltd.
Science and Measurement Instruments Sales Division
Kazunori Kitazumi
+81-3-6262-3567
https://www.jeol.co.jp/en/support/support_system/contact_products.html