EUV Photoresist Pioneer Inpria Raises $31 Million in Series C Funding Led by JSR Corporation
Inpria, a pioneer in high-resolution metal oxide photoresists for extreme ultraviolet lithography (EUV), today announced that it has secured $31 million in Series C funding from a broad syndicate representing leaders from across the semiconductor manufacturing ecosystem. This financing was led by photoresist manufacturer and existing investor, JSR Corporation. New investors included SK hynix Inc. and TSMC Partners. The round also included participation from existing investors Air Liquide Venture Capital ALIAD, Applied Ventures, Intel Capital and Samsung Venture Investment Corporation.
“Inpria is the world leader in metal oxide photoresists for advanced EUV lithography process,” said Mark Slezak, President of JSR Micro and new Inpria Board Director. “We are excited to expand our partnership with Inpria as we collaborate with them on quality and overall market acceptance.”
Comprised of tin-oxide nanoclusters, Inpria photoresists deliver higher resolution with building blocks a fraction the size of traditional polymer-based resists which are tuned to optimally absorb EUV photons. With unparalleled etch selectivity, Inpria photoresists enable simpler manufacturing flows and larger process windows for an overall reduction in cost of ownership. Inpria recently brought online its high-volume manufacturing plant to support the initial production ramp for customers.
“We believe our investor participation serves as an indicator for Inpria’s strategic significance to the semiconductor industry. We are delighted that our investor base now includes all semiconductor manufacturers worldwide that are currently adopting EUV patterning. This achievement is complemented by the strong participation of photoresist, equipment and industrial chemical manufacturer investors as well,” added Andrew Grenville, CEO of Inpria. “We look forward to working with our global partners to deliver a breakthrough EUV photoresist platform to the industry.”
About Inpria
Inpria Corporation is the world leader in metal oxide photoresist design, development and manufacturing. Inpria’s EUV photoresists enable semiconductor manufacturers to realize the full potential of EUV lithography. Learn more at www.inpria.com.
About JSR Corporation
JSR Corporation is a multinational company employing more than 9,000 people worldwide and a leading materials supplier in a variety of technology driven markets. JSR’s global network is headquartered in Tokyo (Japan) and has factories and offices in Europe, USA, China, Taiwan, Korea, Singapore and Thailand. JSR is a research-oriented organization that pursues close collaborations with leading innovators in a number of industries that are a key to the present and future welfare of human society: life-sciences, energy storage, synthetic rubbers, electronic materials, display and edge computing related items. For more information about JSR Corporation, please go to www.jsr.co.jp.
About SK hynix Inc.
www.skhynix.com
About ALIAD
www.airliquide.com/connected-innovation/aliad-venture-capital
About Applied Ventures
www.appliedventures.com or follow @Applied_VC
About Intel Capital
www.intelcapital.com or follow @Intelcapital
About Samsung Venture Investment Corporation
www.samsungventure.co.kr
To view this piece of content from cts.businesswire.com, please give your consent at the top of this page.
View source version on businesswire.com: https://www.businesswire.com/news/home/20200220005292/en/
Contact information
Ann Carney Nelson
541-844-2812
media-relations@inpria.com
About Business Wire
For more than 50 years, Business Wire has been the global leader in press release distribution and regulatory disclosure.
Subscribe to releases from Business Wire
Subscribe to all the latest releases from Business Wire by registering your e-mail address below. You can unsubscribe at any time.
Latest releases from Business Wire
OPPO Joins VVC Advance Patent Pool as a Licensee and Extends HEVC Advance License9.1.2026 04:00:00 EET | Press release
Access Advance LLC and Guangdong OPPO Mobile Telecommunications Corp., Ltd. (OPPO) today announced that OPPO has joined the VVC Advance Patent Pool as a Licensee and renewed its HEVC Advance License. OPPO, one of the world's largest smartphone manufacturers with operations in more than 70 countries, has been a valued participant in Access Advance's HEVC patent pool since 2020, and more recently joined the Advance Video Distribution Patent (VDP) Pool as a Licensor. These latest agreements mark a new milestone in a broad and deepening relationship between the two companies, with OPPO now participating across all three of Access Advance's video codec licensing programs. The VVC Advance Patent Pool licenses patents essential to the VVC/H.266 standard, which delivers remarkable improvement of video compression performance over HEVC, enabling higher-quality video experiences including 4K, 8K, and HDR content with faster downloads and lower latency. The pool currently includes over 4,500 worl
Cessna Citation CJ3 Gen2 Enters Into Service, Delivering the Most Significant Gen2 Updates to Date8.1.2026 23:30:00 EET | Press release
The Cessna Citation CJ3 Gen2 has entered into service, setting a new standard for the Citation Gen2 family. Launch customers and longtime Citation owners Dave Mecartney and Shannon Day took delivery of their new aircraft this week. Mecartney—an experienced aviator with nearly two decades flying Citation light jets and a member of Textron Aviation’s Customer Advisory Board—helped shape the enhancements that elevate the CJ3 Gen2 experience. Key upgrades include Garmin autothrottle technology, added pilot legroom and a fully customizable cabin environment, all driven by customer feedback. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20260108455097/en/ Cessna Citation CJ3 Gen2 enters into service, delivering the most significant Gen2 updates to date (Photo credit: Textron Aviation). The Cessna Citation CJ3 Gen2 is designed and manufactured by Textron Aviation Inc., a Textron Inc. (NYSE: TXT) company. “The Citation CJ3 Gen2 deliv
SPIE, the International Society for Optics and Photonics, Announces Its 2026 Society Awards8.1.2026 19:26:00 EET | Press release
Today, the Awards Committee of SPIE, the international society for optics and photonics, announced the recipients of its prestigious annual awards. Honoring transformative advancements across a range of professional areas — including medicine, astronomy, lithography, optical metrology, optical design, and community leadership — the Society's awards recognize technical accomplishments as well as committed service to SPIE and support of its organizational mission. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20260108227351/en/ SPIE, the international society for optics and photonics, awarded their Gold Medal to Maryellen Giger (pictured here with her team) for pioneering work in computer-aided diagnosis and image analysis/AI, significant impact on clinical translation, and supporting the next generation of medical-imaging scientists and the SPIE community. SPIE Gold Medal: Maryellen Giger For pioneering work in computer-aided
PUMA Appoints Nadia Kokni as Vice President Global Brand Marketing8.1.2026 17:30:00 EET | Press release
Sports company PUMA has appointed Nadia Kokni as Vice President, Global Brand Marketing, effective January 1, 2026. Nadia joins PUMA’s global leadership team and reports directly to Chief Brand Officer Maria Valdes. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20260108099913/en/ Sports company PUMA has appointed Nadia Kokni as Vice President, Global Brand Marketing, effective January 1, 2026. Nadia joins PUMA’s global leadership team and reports directly to Chief Brand Officer Maria Valdes. In her new role as PUMA’s most senior global marketing leader, Nadia will oversee brand marketing strategy, brand marketing creative direction, integrated marketing and communication globally. Her appointment comes as PUMA accelerates its global brand ambition and sharpens storytelling around its product icons and innovation pipeline. Nadia brings deep international experience shaping and transforming leading global brands across the spor
Xsolla Kicks Off Two Weeks of Industry Programming, Community Events, and Expanding Support for Global Developers Across the UK at the Industry’s Biggest Winter Event8.1.2026 17:00:00 EET | Press release
Xsolla, a global video game commerce company that helps developers launch, grow, and monetize their games, today announces a comprehensive program of events and activations across the United Kingdom taking place from January 10 to 22, 2026. This coordinated programming schedule reflects Xsolla’s continued investment in the UK and European games ecosystem. Capitalizing on a pivotal moment in the global games calendar, Xsolla is bringing developers, partners, and creators together through partnerships, live events, thought leadership, and community building. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20260108943976/en/ (Graphic: Xsolla) “Pocket Gamer Connects London brings together one of the most diverse and forward-thinking communities in the mobile global games industry,” said Berkley Egenes, Chief Marketing and Growth Officer. “We’re here to build all the things for the video game industry by helping developers turn grea
In our pressroom you can read all our latest releases, find our press contacts, images, documents and other relevant information about us.
Visit our pressroom