EUV Photoresist Pioneer Inpria Raises $31 Million in Series C Funding Led by JSR Corporation
20.2.2020 15:00:00 EET | Business Wire | Press release
Inpria, a pioneer in high-resolution metal oxide photoresists for extreme ultraviolet lithography (EUV), today announced that it has secured $31 million in Series C funding from a broad syndicate representing leaders from across the semiconductor manufacturing ecosystem. This financing was led by photoresist manufacturer and existing investor, JSR Corporation. New investors included SK hynix Inc. and TSMC Partners. The round also included participation from existing investors Air Liquide Venture Capital ALIAD, Applied Ventures, Intel Capital and Samsung Venture Investment Corporation.
“Inpria is the world leader in metal oxide photoresists for advanced EUV lithography process,” said Mark Slezak, President of JSR Micro and new Inpria Board Director. “We are excited to expand our partnership with Inpria as we collaborate with them on quality and overall market acceptance.”
Comprised of tin-oxide nanoclusters, Inpria photoresists deliver higher resolution with building blocks a fraction the size of traditional polymer-based resists which are tuned to optimally absorb EUV photons. With unparalleled etch selectivity, Inpria photoresists enable simpler manufacturing flows and larger process windows for an overall reduction in cost of ownership. Inpria recently brought online its high-volume manufacturing plant to support the initial production ramp for customers.
“We believe our investor participation serves as an indicator for Inpria’s strategic significance to the semiconductor industry. We are delighted that our investor base now includes all semiconductor manufacturers worldwide that are currently adopting EUV patterning. This achievement is complemented by the strong participation of photoresist, equipment and industrial chemical manufacturer investors as well,” added Andrew Grenville, CEO of Inpria. “We look forward to working with our global partners to deliver a breakthrough EUV photoresist platform to the industry.”
About Inpria
Inpria Corporation is the world leader in metal oxide photoresist design, development and manufacturing. Inpria’s EUV photoresists enable semiconductor manufacturers to realize the full potential of EUV lithography. Learn more at www.inpria.com.
About JSR Corporation
JSR Corporation is a multinational company employing more than 9,000 people worldwide and a leading materials supplier in a variety of technology driven markets. JSR’s global network is headquartered in Tokyo (Japan) and has factories and offices in Europe, USA, China, Taiwan, Korea, Singapore and Thailand. JSR is a research-oriented organization that pursues close collaborations with leading innovators in a number of industries that are a key to the present and future welfare of human society: life-sciences, energy storage, synthetic rubbers, electronic materials, display and edge computing related items. For more information about JSR Corporation, please go to www.jsr.co.jp.
About SK hynix Inc.
www.skhynix.com
About ALIAD
www.airliquide.com/connected-innovation/aliad-venture-capital
About Applied Ventures
www.appliedventures.com or follow @Applied_VC
About Intel Capital
www.intelcapital.com or follow @Intelcapital
About Samsung Venture Investment Corporation
www.samsungventure.co.kr
To view this piece of content from cts.businesswire.com, please give your consent at the top of this page.
View source version on businesswire.com: https://www.businesswire.com/news/home/20200220005292/en/
Contact information
Ann Carney Nelson
541-844-2812
media-relations@inpria.com
About Business Wire
For more than 50 years, Business Wire has been the global leader in press release distribution and regulatory disclosure.
Subscribe to releases from Business Wire
Subscribe to all the latest releases from Business Wire by registering your e-mail address below. You can unsubscribe at any time.
Latest releases from Business Wire
GigaDevice Deepens Ecosystem Collaboration with LVGL to Advance GD32’s Global Open-Source GUI Ecosystem12.10.2026 16:00:00 EEST | Press release
GigaDevice, a leading semiconductor company specializing in Flash memory, 32-bit microcontrollers (MCUs), sensors, and analog products, is deepening its ecosystem collaboration with LVGL. LVGL's Open graphics library is one of the world’s most widely‑adopted open‑source embedded frameworks. Eight GD32 MCU product families have now been officially included in the LVGL ecosystem, providing developers worldwide with more convenient and efficient support for embedded graphics development. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20261012320702/en/ Eight GD32 product series supported on LVGL website LVGL is an open-source graphical user interface framework designed for embedded devices, commercially supported by LVGL Ltd., a technology company based in Cambridge, UK. Lightweight, efficient, and cross-platform, it can be widely used in applications such as smart home devices, industrial control systems, consumer electronics, a
W. L. Gore & Associates Launches GORE® Battery Vents – MultiVent Series at the Battery Show12.10.2026 15:00:00 EEST | Press release
Today, W. L. Gore & Associates (Gore) introduced GORE® Battery Vents – MultiVent Series at The Battery Show North America 2026, a new integrated venting architecture that combines all three functions into a single device. Designed for lithium-ion battery packs in electric vehicles and energy storage systems, GORE® MultiVent is an integrated battery vent: one device that equalizes pressure, protects against moisture and evacuates gas during thermal runaway, then reseals. It gives pack designers an alternative to combining dual-stage vents, separate evacuation valves and desiccants. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20261012625188/en/ GORE® MultiVent GORE MultiVent builds on technology Gore acquired from Vernay Laboratories in 2026 and combines Gore membrane expertise with Vernay’s advanced valve technology. Battery pack designers have traditionally relied on multiple components to manage pressure equalization, mois
Echodyne and ACS Sign Strategic Collaboration Agreement to Advance Counter-UAS Capabilities Worldwide12.10.2026 15:00:00 EEST | Press release
Echodyne, the radar platform company, and ACS, a precision robotics company for defense, today announced the signing of a Strategic Collaboration Agreement to accelerate the development, demonstration, and deployment of integrated counter-unmanned aircraft system (C-UAS) solutions. The agreement establishes collaboration across Echodyne’s high-performance commercial counter-UAS radar hardware and software roadmaps and ACS’s Bullfrog robotic weapon station capabilities, and follows the recent announcement of each company’s award from Joint Interagency Task Force 401 for Domestic Shield, the JIATF-401 C-UAS Marketplace, and other critical counter-drone requirements. Bullfrog combines computer vision, autonomous control, and precision robotics with existing weapon systems to detect, track, identify, and engage unmanned threats. Integrating Echodyne’s precise radar track data extends this capability with persistent airspace positional information, providing earlier awareness and high-confi
Doctors, Public Health Experts and Dental Leaders Call for Oral Health to Become Part of Everyday Health Care12.10.2026 14:34:00 EEST | Press release
Doctors, public-health experts and dental leaders are calling for oral health to be treated as part of overall health. Their message is clear: healthier teeth and gums matter beyond the mouth, and effective daily prevention should become a routine part of health care. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20261015403348/en/ Oral health is part of overall health. Leading health experts are calling for oral health to become part of everyday health care, with prevention starting at home through healthier habits and daily care of teeth and gums. The new international consensus goes well beyond dentistry. It brought together experts in periodontology, cardiology, diabetes care, family medicine, public health, social care and health education. Convened by the European Federation of Periodontology (EFP) and the European Association of Dental Public Health (EADPH), the group calls on governments, health systems and health pro
Pacific Defense Launches NEXUS, a Converged C2 and Electromagnetic Warfare Mission System12.10.2026 14:30:00 EEST | Press release
Pacific Defense, a leading provider of open-architecture C5ISR and electronic warfare mission systems, today announced the launch of NEXUS, a Commercial Off-the-Shelf (COTS) mission system that converges command and control, communications, networking, edge computing, and electronic warfare on a common, adaptable architecture. Built on a Modular Open Systems Approach (MOSA) aligned to SOSA™, CMOSS and OpenVPX™, NEXUS enables mission-specific configurations across mobile, fixed-site, maritime, and airborne operations. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20261012010656/en/ NEXUS converges EW and C5ISR in one, open-architecture system for missions across ground, maritime, and airborne operations. NEXUS brings capabilities traditionally integrated through separate systems onto a common chassis, power, timing, processing, and networking foundation, providing shared infrastructure for C2 and EW mission capabilities. One A
In our pressroom you can read all our latest releases, find our press contacts, images, documents and other relevant information about us.
Visit our pressroom