EUV Photoresist Pioneer Inpria Raises $31 Million in Series C Funding Led by JSR Corporation
20.2.2020 15:00:00 EET | Business Wire | Press release
Inpria, a pioneer in high-resolution metal oxide photoresists for extreme ultraviolet lithography (EUV), today announced that it has secured $31 million in Series C funding from a broad syndicate representing leaders from across the semiconductor manufacturing ecosystem. This financing was led by photoresist manufacturer and existing investor, JSR Corporation. New investors included SK hynix Inc. and TSMC Partners. The round also included participation from existing investors Air Liquide Venture Capital ALIAD, Applied Ventures, Intel Capital and Samsung Venture Investment Corporation.
“Inpria is the world leader in metal oxide photoresists for advanced EUV lithography process,” said Mark Slezak, President of JSR Micro and new Inpria Board Director. “We are excited to expand our partnership with Inpria as we collaborate with them on quality and overall market acceptance.”
Comprised of tin-oxide nanoclusters, Inpria photoresists deliver higher resolution with building blocks a fraction the size of traditional polymer-based resists which are tuned to optimally absorb EUV photons. With unparalleled etch selectivity, Inpria photoresists enable simpler manufacturing flows and larger process windows for an overall reduction in cost of ownership. Inpria recently brought online its high-volume manufacturing plant to support the initial production ramp for customers.
“We believe our investor participation serves as an indicator for Inpria’s strategic significance to the semiconductor industry. We are delighted that our investor base now includes all semiconductor manufacturers worldwide that are currently adopting EUV patterning. This achievement is complemented by the strong participation of photoresist, equipment and industrial chemical manufacturer investors as well,” added Andrew Grenville, CEO of Inpria. “We look forward to working with our global partners to deliver a breakthrough EUV photoresist platform to the industry.”
About Inpria
Inpria Corporation is the world leader in metal oxide photoresist design, development and manufacturing. Inpria’s EUV photoresists enable semiconductor manufacturers to realize the full potential of EUV lithography. Learn more at www.inpria.com.
About JSR Corporation
JSR Corporation is a multinational company employing more than 9,000 people worldwide and a leading materials supplier in a variety of technology driven markets. JSR’s global network is headquartered in Tokyo (Japan) and has factories and offices in Europe, USA, China, Taiwan, Korea, Singapore and Thailand. JSR is a research-oriented organization that pursues close collaborations with leading innovators in a number of industries that are a key to the present and future welfare of human society: life-sciences, energy storage, synthetic rubbers, electronic materials, display and edge computing related items. For more information about JSR Corporation, please go to www.jsr.co.jp.
About SK hynix Inc.
www.skhynix.com
About ALIAD
www.airliquide.com/connected-innovation/aliad-venture-capital
About Applied Ventures
www.appliedventures.com or follow @Applied_VC
About Intel Capital
www.intelcapital.com or follow @Intelcapital
About Samsung Venture Investment Corporation
www.samsungventure.co.kr
To view this piece of content from cts.businesswire.com, please give your consent at the top of this page.
View source version on businesswire.com: https://www.businesswire.com/news/home/20200220005292/en/
Contact information
Ann Carney Nelson
541-844-2812
media-relations@inpria.com
About Business Wire
For more than 50 years, Business Wire has been the global leader in press release distribution and regulatory disclosure.
Subscribe to releases from Business Wire
Subscribe to all the latest releases from Business Wire by registering your e-mail address below. You can unsubscribe at any time.
Latest releases from Business Wire
Multi-Color Corporation Successfully Completes Comprehensive Financial Restructuring12.5.2026 19:09:00 EEST | Press release
Multi-Color Corporation ("MCC" or the "Company") today announced the successful completion of the Company’s financial restructuring process and emergence from its prepackaged Chapter 11 process. The Company’s prepackaged restructuring reduced net debt by approximately $3.8 billion, reduced annualized cash interest expense by more than $330 million, and extended long-term debt maturities to 2033. More than 99% of voting stakeholders voted to accept MCC’s Plan of Reorganization. Upon emergence, MCC also received a significant $889 million new common and preferred equity investment from CD&R and a group of MCC’s existing secured lenders to support MCC’s long-term growth and investment. "Today marks a significant milestone for MCC, as well as our customers, teammates, and partners who have supported us throughout this process,” said Hassan Rmaile, President and Chief Executive Officer of MCC. “Over the last several months, we continued to diligently serve and win clients, sharpened our ope
New Cessna Caravans to Boost USDA’s Fight Against Crop-Damaging Insects12.5.2026 18:00:00 EEST | Press release
Textron Aviation Inc., a Textron Inc. (NYSE: TXT) company, today announced that the U.S. Department of Agriculture (USDA) Animal and Plant Health Inspection Service (APHIS) has ordered three Cessna Caravan aircraft to support its sterile insect release program protecting citrus crops along the Rio Grande River in southern Texas. The new aircraft are expected to be delivered in 2027. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20260512676348/en/ Mission-Ready: The Cessna Caravan joins USDA’s fight to protect Texas citrus from invasive pests APHIS will use the Caravans to carry and release sterile insects that help prevent the spread of destructive pests, including fruit flies. The environmentally friendly technique helps safeguard fruit-bearing trees, reduce crop damage and protect agricultural industries that rely on healthy harvests. “These aircraft will help APHIS reach remote areas and carry out their important mission o
Elliptic Secures $120 Million Investment From Nasdaq Ventures, Deutsche Bank, One Peak and the British Business Bank12.5.2026 17:05:00 EEST | Press release
Elliptic, the global leader in digital asset decisioning, today announced the closing of a $120 million Series D fundraise led by One Peak, with participation from Nasdaq Ventures, Deutsche Bank and the British Business Bank. The round values Elliptic at $670 million. These investors are among the most consequential institutions in global finance, together responsible for trillions in daily market activity, and they have placed their confidence in Elliptic. It is a signal about where the financial system is heading and who is trusted to underpin it, with Elliptic screening more of the global on-chain economy than any other private sector provider. The fundraise will accelerate Elliptic's mission to deliver the enterprise-grade on-chain analytics for the world's largest and most demanding banks, fintechs, government agencies and crypto and payments companies in the world. “As digital assets become more embedded in the global financial system, institutions need trusted infrastructure to
Rigaku Accelerates Next-generation Semiconductor Metrology Development Leveraging World-Class Research Infrastructure12.5.2026 17:00:00 EEST | Press release
Rigaku Corporation, a global solution partner in X-ray analytical systems and a group company of Rigaku Holdings Corporation (headquarters: Akishima, Tokyo; CEO: Jun Kawakami; “Rigaku”), announced the expansion of its development of metrology technologies for next-generation semiconductors, leveraging global research environments. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20260512888328/en/ Signing ceremony with imec held on April 9 As part of this initiative, Rigaku is working with imec, a world-leading semiconductor research and innovation hub headquartered in Belgium, under a three-year development program. Through this effort, Rigaku will advance its core X-ray technologies, including 3D device metrology, high-sensitivity detection of ultrathin films and trace elements, and non-destructive inspection of microscopic defects. As semiconductor devices evolve toward advanced architectures such as Gate-All-Around (GAA) and
Aster Guardians Global Nursing Award Announces Top 10 Finalists for 202612.5.2026 16:54:00 EEST | Press release
On the occasion of International Nurses Day, Aster DM Healthcare has announced the Top 10 finalists for the fifth edition of the Aster Guardians Global Nursing Award 2026, selected from over 134,000 registrations across 214* countries and economies. One of the Top 10 finalists will be honoured with the grand title and a prize of USD 250,000. Aster has appointed Ernst & Young LLP as the 'Process Advisors' of the award. EY has defined a three-stage evaluation process to determine the finalists and the winner. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20260512872373/en/ Aster Guardians Global Nursing Awards 2026 - Top 10 Finalists (Photo: AETOSWire) The top 10 finalists for 2026 includes: Dr. Agimol Pradeep (United Kingdom), Dr. Aidah Alkaissi (Sweden), Dinah Sevilla (The Kingdom of Saudi Arabia), Dr. Hammoda Abu-Odah (Hong Kong SAR, China), Hindumbi Kaurom Kakkada (India), Johana Patricia Galvan Barrios (Colombia), Josephin
In our pressroom you can read all our latest releases, find our press contacts, images, documents and other relevant information about us.
Visit our pressroom