EUV Photoresist Pioneer Inpria Raises $31 Million in Series C Funding Led by JSR Corporation
20.2.2020 15:00:00 EET | Business Wire | Press release
Inpria, a pioneer in high-resolution metal oxide photoresists for extreme ultraviolet lithography (EUV), today announced that it has secured $31 million in Series C funding from a broad syndicate representing leaders from across the semiconductor manufacturing ecosystem. This financing was led by photoresist manufacturer and existing investor, JSR Corporation. New investors included SK hynix Inc. and TSMC Partners. The round also included participation from existing investors Air Liquide Venture Capital ALIAD, Applied Ventures, Intel Capital and Samsung Venture Investment Corporation.
“Inpria is the world leader in metal oxide photoresists for advanced EUV lithography process,” said Mark Slezak, President of JSR Micro and new Inpria Board Director. “We are excited to expand our partnership with Inpria as we collaborate with them on quality and overall market acceptance.”
Comprised of tin-oxide nanoclusters, Inpria photoresists deliver higher resolution with building blocks a fraction the size of traditional polymer-based resists which are tuned to optimally absorb EUV photons. With unparalleled etch selectivity, Inpria photoresists enable simpler manufacturing flows and larger process windows for an overall reduction in cost of ownership. Inpria recently brought online its high-volume manufacturing plant to support the initial production ramp for customers.
“We believe our investor participation serves as an indicator for Inpria’s strategic significance to the semiconductor industry. We are delighted that our investor base now includes all semiconductor manufacturers worldwide that are currently adopting EUV patterning. This achievement is complemented by the strong participation of photoresist, equipment and industrial chemical manufacturer investors as well,” added Andrew Grenville, CEO of Inpria. “We look forward to working with our global partners to deliver a breakthrough EUV photoresist platform to the industry.”
About Inpria
Inpria Corporation is the world leader in metal oxide photoresist design, development and manufacturing. Inpria’s EUV photoresists enable semiconductor manufacturers to realize the full potential of EUV lithography. Learn more at www.inpria.com.
About JSR Corporation
JSR Corporation is a multinational company employing more than 9,000 people worldwide and a leading materials supplier in a variety of technology driven markets. JSR’s global network is headquartered in Tokyo (Japan) and has factories and offices in Europe, USA, China, Taiwan, Korea, Singapore and Thailand. JSR is a research-oriented organization that pursues close collaborations with leading innovators in a number of industries that are a key to the present and future welfare of human society: life-sciences, energy storage, synthetic rubbers, electronic materials, display and edge computing related items. For more information about JSR Corporation, please go to www.jsr.co.jp.
About SK hynix Inc.
www.skhynix.com
About ALIAD
www.airliquide.com/connected-innovation/aliad-venture-capital
About Applied Ventures
www.appliedventures.com or follow @Applied_VC
About Intel Capital
www.intelcapital.com or follow @Intelcapital
About Samsung Venture Investment Corporation
www.samsungventure.co.kr
To view this piece of content from cts.businesswire.com, please give your consent at the top of this page.
View source version on businesswire.com: https://www.businesswire.com/news/home/20200220005292/en/
Contact information
Ann Carney Nelson
541-844-2812
media-relations@inpria.com
About Business Wire
For more than 50 years, Business Wire has been the global leader in press release distribution and regulatory disclosure.
Subscribe to releases from Business Wire
Subscribe to all the latest releases from Business Wire by registering your e-mail address below. You can unsubscribe at any time.
Latest releases from Business Wire
Kingswood Capital Management Enters Into a Definitive Agreement to Acquire Coveris’ Paper Unit, Rebrands as Paragon Print and Packaging10.2.2026 14:00:00 EET | Press release
Kingswood Capital Management, LP (together with its affiliates, “Kingswood”) announced today that it has entered into a definitive agreement to acquire Business Unit Paper (“BU Paper”) from Coveris, a global manufacturer of paper and plastic packaging solutions. As part of the transaction, BU Paper will be rebranded Paragon Print and Packaging (“Paragon”), restoring the unit’s original name. Jo Ormrod, Chief Operating Officer, will serve as Paragon’s Chief Executive Officer, and the existing company management will remain in place. The transaction is expected to close in several weeks, subject to customary legal and regulatory requirements. Paragon produces high-quality, sustainable paper-based packaging solutions, including for key end markets such as food, household, and personal care. The company, which was established in 1994, specializes in products like self-adhesive and linerless labels, lined board, cartons, and trays using eco-friendly materials. “We are excited about our next
Umm Al Qura for Development & Construction Company Concludes Participation in Real Estate Future Forum 202610.2.2026 13:59:00 EET | Press release
Umm Al Qura for Development & Construction Company, the owner, developer, and operator of Masar Destination in Makkah, has concluded its participation as a strategic partner in this year’s Real Estate Forum (RFF). The forum was held in Riyadh from January 26 to 28 under the patronage of His Excellency, the Minister of Municipal Rural Affairs and Housing, Mr. Majid bin Abdullah Al-Hogail. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20260210508479/en/ Masar Promenade View (Photo: AETOSWire) The company’s pavilion, which drew strong interest from investors and visitors, presented Masar Destination’s key components, available investment opportunities, and recent project developments. It also highlighted the significant progress achieved in recent months. During the forum, Umm Al Qura for Development & Construction announced the launch of a unified digital ownership platform through approved developers. The platform provides acc
Ireland Takes Centre Stage as MICHELIN Awards Come to Dublin for the First Time10.2.2026 13:06:00 EET | Press release
Ireland’s reputation as a world-class culinary destination was celebrated this evening as the MICHELIN Guide UK & Ireland Awards were held in Ireland for the very first time, celebrating the country’s exceptional chefs, restaurants and producers on an international stage. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20260209670808/en/ Fôret Restaurant, Dublin At a ceremony hosted in Dublin, MICHELIN unveiled its latest selection for the UK & Ireland, with a number of Irish restaurants recognised for their creativity, craftsmanship and commitment to quality, marking a significant moment for Ireland’s evolving food scene and its growing appeal among international diners. The ceremony included the announcement of the MICHELIN Stars, the Bib Gourmands for great value dining, and a series of Special Awards recognising outstanding individuals and teams in hospitality. Eight Irish restaurants were awarded in total at the ceremony.
MultiBank Group Launches 50% Rebate Boost for IBs & 25% Deposit Bonus for Clients10.2.2026 12:43:00 EET | Press release
MultiBank Group, one of the world’s largest and most regulated financial derivatives institution, has announced the launch of two limited-time promotional programs designed to reward both its Introducing Broker network and retail trading clients. This press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20260210880239/en/ MultiBank Group has announced the launch of two limited-time promotional programs designed to reward both its Introducing Broker network and retail trading clients. The programs reflect the firm's ongoing strategy to strengthen relationships across its partner and client ecosystem while maintaining the competitive positioning that has supported the Group's growth since its establishment in 2005. Elite IB Promo: Enhanced Partner Compensation Under the Elite IB Promotion, MultiBank Group's Introducing Brokers are eligible to receive a 50% boost on their standard rebate and commission structures. The program provides IBs t
OPEX® Corporation Introduces the Velo™ Series of Premium Desktop and High Production Document Scanners10.2.2026 11:00:00 EET | Press release
OPEX® Corporation, a global leader in Next Generation Automation providing innovative solutions for warehouse, document and mail automation, has announced the launch of its Velo™ Series powered by InoTec, a new class of premium desktop and free standing high production scanners. The OPEX Velo scanners are engineered to deliver exceptional performance, reliability and image quality and offer industry-standard TWAIN/ISIS connectivity to help simplify deployment into existing capture environments. These state-of-the-art scanners are ideal for service bureaus, government agencies, healthcare providers and enterprise capture operations. “The Velo Series powered by InoTec introduces an entirely new class of scanners to the OPEX portfolio, expanding the options available to both our current customers and organizations considering OPEX for the first time,” said Dann Worrell, President, Document and Mail Automation, OPEX. “By broadening our offerings, we can better align the right solution with
In our pressroom you can read all our latest releases, find our press contacts, images, documents and other relevant information about us.
Visit our pressroom